Xenon

The Production of Xenon Gas

Semiconductor and Memory Chip Manufacturing

Air Products high-purity xenon is ideal as an atmosphere, plasma and as an ion beam source for etching and deposition.

Aerospace and Ion Engines

High-purity xenon is important to ensure the long lifespan of electrodes.

Lighting

High-purity xenon is important to ensure superior brightness and long lifespan of the filaments.

Dark Matter Research

Ultra-high-purity Xenon is specially designed for spectroscopy detectors of gamma-ray and X-ray for dark matter.

Anesthesia and CT Scan

Ultra-high purity medical grade xenon is used in anesthesia as it is very safe for the neurological system.

Xenon for Semiconductor and Memory Chips Manufacturing

Xenon is used for etching and deposition of microchips in semiconductor manufacturing, both as an atmosphere, plasma and as an ion beam source for etching and deposition processes. Xenon used in this process needs to be very pure as any impurities will end up contaminating the silicon substrate or reacting with the process chemicals like fluorine to produce poisonous and highly corrosive hydrogen fluoride (HF). As a global leader in servicing the electronics industry, Air Products’ xenon is produced in our state-of-the-art electronics grade plant for better quality assurance. It can be used in excimer laser, laser buffer gases, etching of DRAM and 3D NAND and plasma display panels.

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